Hitachi S-4300E (Thermal FE type)＋
Tokyo Technology Beam Draw
(VBL property)
Hitachi S-4300E (Thermal FE type)＋
Tokyo Technology Beam Draw
(VBL property)
JEOL JSM-5310 (W-filament type)
+ Tokyo Technology Beam Draw
Digital Oscilloscope
Spectrum Analyzer
Ultrasonic Microscopy System
Ion Milling System
Reactive Ion Etching System
Vacuum Evaporation System
Plasma CVD System
Laser Lithography System
Diamond Wire Cutter
X-Ray Diffractmeter
Laser Microscope
Vector Network Analyzer with Time Domain Function
Sputtering System
Neoark DDB201
Meiwa Forces DWS32421
Atomic Force Microscope
Electron Beam Lithography System (SEM-based)
Signal Source Analyzer
Laser Probe System
Wire Bonder
