Basic idea of SAW droplet maniplator.
1. Development of High Performance SAW devices
Further improvements are always crucial for performances of SAW devices.
We always
try to enhance device properties from various aspects.
2. Development of Laser Probe for High Frequency Acoustic Wave Devices
Acoustic vibration can be sensed by the laser diffraction. We are applying
this to
the development of a diagnosis tool for high performance acoustic wave
devices in
GHz range.
Configuration of recursive filter
We investigate high performance acoustic wave devices in GHz range, which
are widely used mobile communication equipment. As a specialist on Surface
Acoustic Wave (SAW) devices, various research projects are undergoing through
strong worldwide cooperation with academies and industries.
3. Realization of New Functionalities by Acoustic Wave Devices
We are developing new functions such as variable filter and droplet manipulators
by
combining high performance acoustic wave devices with RF circuit technologies.
Frequency dependence of developed ultra-wideband SAW filter
Frequency response of developed SAW resonator in SHF range
Fabricated IDT with line widths of
0.5micro-meter
Surface image of specimen
(thin film bulk acoustic resonator).
Result of laser probe measurement.at 1.9 GHz, maximum amplitude:circa 50
pm.
Fundamental topology of
Surface Acoustic Wave Devices
